focus sensor信息详情
聚焦传感器
focus───vt.使集中;使聚焦;n.焦点;中心;清晰;焦距;n.(Focus)人名;(瑞典)福库斯;vi.集中;聚焦;调节焦距
accelerometer sensor───加速度传感器
sample focus───样本焦点
central focus───主要焦点;中心焦点
focus today───关注今天
sensor tap───传感器抽头
burglar sensor───防盗传感器
area sensor───面积传感器
Cloud sensor───云传感器
The optical focus sensor includes a splitter configured to split the radiation beam into a first sub-beam and a second sub-beam.───光学聚焦传感器包括分束器,该分束器配置为将辐射光束分为第一子光束和第二子光束。
To detect whether a substrate is in a focal plane of an inspection apparatus, an optical focus sensor is arranged to receive a radiation beam via an objective lens.───为了探测衬底是否处在检查设备的焦平面上,一种光学聚焦传感器被布置为通过物镜接收辐射光束。
The f-stop, otherwise known as the aperture, determines your depth of field (the area in focus) and how much light can pass through the lens to reach the sensor.───f制光圈(或称光圈)决定相机的景深(对焦区域)以及有多少光能通过镜头到达传感器。
The present invention discloses an optical focus sensor, an inspection apparatus and a lithographic apparatus.───本发明公开了一种光学聚焦传感器、检查设备以及光刻设备。
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